Ion Beam Systems

The Scotech Ion Beam Etch system is a low cost, bench top system that utilizes a Veeco 5cm DC Ion Source. The stainless steel vacuum chamber is turbo pumped and has an ultimate pressure of 10-8 Torr.

Pressure and gas flow are monitored by Pirani and Penning gauging and Ar is provided for the ion source via a Mass Flow Controller.

The ion source power supply and all control instrumentation is housed in the adjacent 19” rack.

Options include a water-cooled tilting stage and RF ion source.

The system is easily configured to customer specific specification. Contact us for further information.