Water Vapour Cryopumps

Fast pump down, with the efficient trapping of water vapor in the chamber, is a key requirement for maximum efficiency in thin film coating. The Telemark TVP series provides the latest advancements in cryotrap technology:

Fast "Cool Down" for shorter cycle times. More Efficient Water Vapour Pumping
Small Footprint (CooIing Power)
Fast Defrost
Small Footprint
Comprehensive Digital Control Package with Digital Communication Connectivity

Water Vapour Cryotraps

Decrease Pump down times by 25% to 90%
Attain Deeper Vacuum
Improve Deposition Quality
Eliminate Costly LN² Usage For Fast Payback
Single or Dual Circuit Models

Model TVP3500/TVP2000/T\/ P1000

Water Vapor Cryotraps

Drawing on our leadershlp in the field of vacuum PVD coating, Telemark has developed a new llne of cryogenic water vapor trepe. Improved technology wlthln me Telemark TVP water vapor Cryotrape delivers better performance and reliability.

TVP Water Vapor Cryotraps are fully compatible with your existing vacuum system installation. Careful attention has been paid to the interface between the user and the cryotrap and the way ln which the TVP is connected to the vacuum system.

An advanced dlgltal control system allows all aspects of the process to be monitored. The on-board system enables simple and seamless integratlon of the TVP into your existing process control. CE mark units are avaliable. The TVP has dlfferlng refrigerant blends to meet all applicable natlonal/regional envlronmental requirements. Greater electrical efficiency lowers the overall Total Global Warming Equivalent Index (TWEI) ratlng.

Cryosurface Temperature vs. Cryopumping Efficiency and Water Vapor Partial Pressure

Efficiency %	98	95
Water Vapor Partial Pressure, Torr	Cryosurface Needed	Temperature (Degrees C)
5 x 10	-89.6	-84.3
2 x 10	-94.6	-89.6
1 x 10	-98.2	-93.4
5 x 10	-101.6	-97.0
2 x 10	-106.0	-101.6
1 x 10	-109.1	-104.9
5 x 10	-112.2	-108.1
2 x 10	-116.0	-112.2
1 x 10	-118.8	-115.1
5 x 10	-121.5	-117.9
2 x 10	-125.0	-121.5
1 x 10	-127.5	-124.1
5 x 10	-129.9	-126.7
2 x 10	-132.9	-129.9
1 x 10	-135.2	-132.2
5 x 10	-137.3	-134.5
2 x 10	-140.1	-137.3
1 x 10	-142.1	-139.5

Selection of TVP Model

Selection of the correct model of theTelemark TVP depends upon two primary factors: The amount of water vapor that needs to be trapped and the total heat load the system needs to manage.

The TVP1000 delas with heat loads up to 1000 watts and can trap up to 50,000 1/sec of water vapor at a variety of vacuum depths. The TVP2000 handles heat loads up to 2000 watts and can trap up to 90,000 I/sec of water vapor at a variety of vacuum depths. The TVP3500 can manage a combined heat load of 3500 Watts and can trap up to 220,000 I/sec

When determining the optimum vapor trapping capability to significantly improve pump-down times, a preliminary goal should be to achieve at least four times the current water vapor trapping capability of your high vacuum pump.

Total heat load is a combination of: 35 watts/square ft. of cryosurface, 8 Watts per linear ft. of insulated refrigerant line, "latent" heat loads which are extensive at shallow vacuum depth but can be ignored at 10-4; or below, and in-chamber heating of:

deg C	black body load in W/sq ft	shielded load in W/sq ft
50	55	42
100	100	75
150	167	125
200	262	197

The overall heat load on the TVP system is the combination of all of the above.

Cryocoils

Working from Chamber drawings or specification, a custom designed cryocoil can be fabricated to perfectly fit your chamber and deliver optimal vapor trapping and heat removal performance.

Cryocoils are made from coppertubing (stainless steel is also available) and constructed with a stainless steel feedthrough.

Many different coil shapes and configurations allow for optimum efficiency of your cryosurface.

Digital Control

The advanced digital control package operates at 24 V and has battery back-up. Two 20 character 1/2" high backlit readouts allow for easy reading and rapid scrolling through all available monitor points.

Convenient interface capability for RS-232 or RS-485 allow for easily adapted system controls or external data-logging. This advanced control package is placed inside the main unit housing, creating a smaller overall system footprint. The flexible capabilities of the controller remove the need for additional and costly system control options or specialised interface modules. A 37-pin remote connector is included for those wishing remote analog system control.

Feedthroughs

(Available separately or as part of the cryocoil)
The dual pass feedthrough gives access to the chamber while maintaining the thermal isolation between the feed and return tubing. On the external side, couplings mate directly with the refrigerant line. On the chamber side, the feedthrough is braised to the cryosurface lines.

Single pass feedthroughs are also available.

Refrigerant Line

The "refrigerant line" contains both a feed line and a return line of copper tubing with stainless steel couplings to mate with the feedthrough. The refrigerant line is protected with foam type thermal insulation to minimise heat loss and protect against exposure to open air.

Dual Circuit Cryotraps

The TVP2000 and TVP3500 are available in dual circuit models in which the systems provide independent control and cooling of two surfaces. Common configurations are two cryocoils or a cryocoil and a cryobaffle. Each circuit can cool or defrost independently with minimal effect on the circuit. For cryobaffles protected by a gate valve, the baffle can be constantly maintained at cryo-temperature while the in-chamber cryocoil is cycled for expected process time improvements. Each circuit is independently controlled and monitored.

Dual Circuit Models are:
TVP2000D
TVP3500D

Specifications

	TVP1000	TVP2000	TVP3500
Maximum Load (Watts)	1,000	2,000	3,500
Pumping Speed I/sec	50,000	90,000	220,000
Ultimate Vacuum	2 x 10 -8 (torr) mbar	2 x 10 -8 (torr) mbar	2 x 10 -8 (torr) mbar
Weight	485 lbs. 243 kg	836 lb. 380 kg	1078 lb. 490 kg
Power supply	380 - 440 VAC 3 ph 50/60 Hz or 200-230 VAC 3 ph 50/60 Hz	380 - 440 VAC 3 ph 50/60 Hz or 200-230 VAC 3 ph 50/60 Hz	380 - 440 VAC 3 ph 50/60 Hz or 200-230 VAC 3 ph 50/60 Hz
Max Current Draw @200-230V	Cooldown - 30 Amps Run - 15 Amps Standby - 10 Amps	Cooldown - 60 Amps Run - 30 Amps Standby - 30 Amps	Cooldown - 90 Amps Run - 58 Amps Standby - 29 Amps
Max Current Draw @380-440V	Cooldown - 15 Amps Run - 7.5 Amps Standby - 5 Amps	Cooldown - 35 Amps Run - 18 Amps Standby - 15 Amps	Cooldown - 60 Amps Run - 38 Amps Standby - 15 Amps
Water requirement (Maximum)	5 lt/min @ 15° C 10 lt/min @ 25° C 20 lt/min @ 32° C	6 lt/min @ 15° C 12 lt/min @ 25° C 30 lt/min @ 32° C	12 lt/min @ 15° C 24 lt/min @ 25° C 38 lt/min @ 32° C
Water connections	3/4" BSP female & hose barbs	3/4" BSP female & hose barbs	3/4" BSP female & hose barbs
Refrigeration Connections	½" parker UltraSeal	½" parker UltraSeal	½" parker UltraSeal