Address
Netherton Road
Langbank
Renfrewshire
Scotland, UK
PA14 6YG
Scotech recently purchased the stock and assets of Ichor Systems (Scotland) Ltd. and can supply over 14,000 line items of Lam Research parts, major subassemblies and consumables. Listed below is just a small example of our stock, but please feel free to download the full spreadsheet of available parts. If there is an item you’re looking for on the spreadsheet, that isn’t listed, it’s always worth contacting us as we may have a used, repaired or refurbished part available. The majority of our parts are for Rainbow and Alliance 150mm & 200mm.
Steven Fraser, our Managing Director was the Northen European Sales Manager for Lam Research for seven years, before starting Scotech. Along with an ex Ichor employee, who has recently joined Scotech, we have strong experience of the parts which make up this legacy toolset.
Man. Part No:
853-330601-009
TCP Coil – New, unopened
Man. Part No:
839-073761-101
Bellows Valve – New, unopened
Man. Part No:
839-800327-509
ESC – Ceramic 200mm – New, unopened
Man. Part No:
716-030136-001
Edge Ring – Used
Man. Part No:
718-094523-261
ESC 150mm – Used
Man. Part No:
839-011907-001
Silicon Electrode 8″ – New
Man. Part No:
716-331099-001
Quartz Edge Ring, 6″ ESC – New
Man. Part No:
799-031620-002
Brooks Automation Mag 7 Robot & Transfer Arm Kit – New
Man. Part No:
853-03229-003
T-Match – Used – can be supplied Refurbished on request.
Man. Part No:
853-025083-003
Mini Match Network – New
Man. Part No:
853-440462-508
8″ ESC – Used
Man. Part No:
839-252352-001
8″ ESC – Used
Man. Part No:
716-331099-267
6″ Edge Ring – New
Man. Part No:
715-330984-011
R GND LOW CAP BGST OPNG – New
Man. Part No:
715-011953-001
Seal Plate – Used
Man. Part No:
660-098076-003
Power Supply – Refurbished
Man. Part No:
715-140287-005
Upper Electrode Clamp Ring – New
Man. Part No:
715-031752-207
Lower Electrode Cap, 6″ – New
Man. Part No:
797-170233-305
Unit MFC 50sccm Cl2 – New
Man. Part No:
788-1X0604-20
30% O2/He 20sccm Range MFC- New
Man. Part No:
716-331157-024
TCP Window- New
Man. Part No:
716-331157-004
TCP Window- New
Man. Part No:
713-412196-001
Chamber Cover – New
Man. Part No:
853-015130-503
Mini Match Network – Used – can be supplied Refurbished on request.
Man. Part No:
290000-078
Mag 7 Leap – Lightly used
Man. Part No:
853-250001-023
Mini Match Network – Used – can be supplied Refurbished on request.
Man. Part No:
716-011651-008
Edge Ring 8″ – New
Man. Part No:
685-096202-002
ENI 27.12 MHZ Match Network – Refurbished
Man. Part No:
SEC-Z312M
30SCCM N2 MFC – New
Man Part No:
790-097959-002
CPS Applicator for AsTex Microwave Strip – Used
Man. Part No:
716-011624-001
Lower Insulator Ring – Used
Man. Part No:
810-190108-002
PC Card Vapour Delivery – New
Man. Part No:
03365-020
Asyst Loader – New
Man. Part No:
685-347339-007
CPS-Alliance – New
Man. Part No:
853-015130-103
Mini Match – Used – can be supplied Refurbished on request.
Man. Part No:
853-032190-306
TCP Upper Match – Used – can be supplied Refurbished on request.
Man. Part No:
002-0016-04
Mag 7 Transfer Arm – New but opened
Man. Part No:
716-331142-203
8″ Edge Ring – New
Man. Part No:
685-901230-105
Verity Instruments Spectrograph – New
Man. Part No:
810-017086-002
ESC Power Supply – New
Man. Part No:
796-046752-003
Adixen Turbo Controller – New
Man. Part No:
Osaka Vacuum Molecular Drag Pump & Controller – Refurbished
Man. Part No:
660-021964-001
Advanced Energy RF Match – 3155036-006 – New
Man. Part No:
799-329868-002
Brooks Aligner Chamber – New, but slight shipping damage
Man. Part No:
853-015130-204
Mini Match – New
Man. Part No:
853-330951-021
Mini Match –Used – can be supplied Refurbished on request.
Man. Part No:
853-025735-001
Mini Match – Used – Can be supplied Refurbished on request.
Man. Part No:
853-032294-002
T-Match – New
Man. Part No:
796-186646-001
VAT Throttle Valve – New
Man. Part No:
210-0495288-100
Power Distribution Box – New