PARTS & CONSUMABLES
Ion Sources
- Spare Parts for all Veeco / Ion Tech DC & RF Gridded Ion Sources, many available from stock
- Spare Parts for all Veeco / Commonwealth Scientific End Hall Sources, many available from stock
- Consumable Parts for ion sources available from stock:
- Filaments
- Insulators
- Grids
- Gas Distribution Plates
- Anodes
- Hollow Cathode Tips
- Keeper Plates
- Replacement Cables
Spares, Consumable Items and Upgrades for Temescal Deposition Systems
- CV-6SL, CV-6SLX & CV-12SLX E-Gun Power Supplies for Rental / Loan / Purchase
- Filament Power Supplies for Rental / Loan / Purchase
- EBC Controllers for Rental / Loan / Purchase
- Ion Source Controllers for Rental / Loan / Purchase
- VV400 Viewport Parts
- Feedthroughs
- Gate Valve Parts
- Shield Kits
- Substrate Holders
- E-Gun Rebuilds
- Simba Retrofits to CV-series Solid State Power Supplies
- TRC3460 & SS64 Upgrades to EBC Controller
- TCS Upgrades to W10
Spares & Consumable Items for Temescal / Ferrotec E-Guns
Virtually all Temescal / Ferrotec E-Gun parts and consumables in stock:
- Filaments
- Insulators
- Cathode Blocks – Anodes – Beam Formers – Brackets
- Complete Emitter Assemblies
- O rings
- Focus Coils
- Crucibles & Covers
- Quad Rings
- Gun Rebuild Kits
- Seal Kits
Spares & Consumable Items for Telemark / Leybold E-Guns
Many spare E-Gun parts and consumables in stock:
- Filaments
- Insulators
- Cathode Blocks – Anodes – Beam Formers – Brackets
- Complete Emitter Assemblies
Quartz Monitor Crystals for Thin Film Deposition
Available from stock for many different deposition controller OEM’s
- 6MhZ – Alloy – Silver – Gold
- 5MhZ – Alloy – Silver – Gold
Bayer Alpert Ion Gauge Tubes
Available from stock for many different Vacuum Controllers
- Tungsten & Thoria-Coated Iridium Filaments
- Glass, Pyrex or Kovar Tubulation
E-Gun Crucible Liners
Available from stock for a variety of OEM E-Guns
- Multiple Materials
- Multiple dimensions
Thermal Evaporation Boats & Filaments
Available from stock
- Covered, Baffled, Dimpled, Flat, Pan etc.
Cryopump Adsorbers & Cryopump Rebuilds
Available from stock
- For all CTI (Edwards) Cryo Compressors
- Pump rebuild service