Plasma Etch Electrodes

TEL ® Etchers
LAM Research ® Etchers

Raw Material - Single Crystal Silicon

The raw materials of the silicon electrodes are carefully controlled according to the supplier specifications.

Inspection item	Specification	Receiving inspection
P-type (Boron dope)	Purchase specifications and Delivery specifications	Based on the inspection results of a Crystal Puller
Crystal orientation (1,0,0)
Purity
Slip		Acid etching and visual inspection
Resistivity		Four prove measurement
Size		Slide calipers and Micrometer
Heat treatment	According to spec.

Electrode Plate-Machining technology

Our machining technology enable us to deliver superior surface finish of the gas hole.

SEM Photographs of gas hole

Other products

For TEL ® Etchers:
Carbon electrode; TE-580, TE-5000 series, TE-8500, UNITY
Silicone electrode; TE-5000 series, TE-8500, UNITY-DP * IEM * AIEM * SCCM
Carbon focus ring; TE-7000 series, UNITY-DM * DRM
Silicon focus ring; TE-7000 series, UNITY-DM * DRM * IEM * AIEM * SCCM

For LAM Research ® Etchers:
Edge ring, Hot edge ring
Insert ring