Intelligent Micro Patterning

SF-100 XTEND

For the Ultimate in Productivity, You Need the SF-100 XTEND

At Intelligent Micro Patterning, our customers are always looking to do something different and unique. This distinctiveness has driven us to develop our two main optical sets, the standard optics and the high resolution optics. As our customers have embraced these two different technologies, a number of opportunities have arisen where our customers want to run both optics sets at the same time. This desire has led to the development of the SF-100 XTEND.

With the SF-100 XTEND, two optical paths are integrated onto a single platform, allowing you switch between them quickly and easily. The system is ideal for customers who have both large and small features located in a single design and need to optimize their throughput. With the SF-100 XTEND, both sets of optics are always ready, so running these advanced designs is easy and fast. Also, since a single stage is shared between both sets of optics, the user gets significant capabilities at a low system price.

The SF-100 XTEND Provides All of These Features on a Single System:

Two distinct, fully functional optical paths, with each containing:

• Mercury arc lamp light source, providing standard g-, h-, and i-line energies at the substrate.


• Field proven optical design integrated with patented Smart Filter Technology.


• Integrated CCD camera for in-line substrate viewing. Labwindows™ based Vision Developers Module provides the basis
  for all camera functions on the system, ensuring reliability and versatility.
  
  
• A complete set of optics for patterning fine features down to 1 micron in size. One optical path is designed using our standard optics, while the other optical path is designed with our high resolution optics.


• Labwindows™ based software integrates all systems functions, while providing an open platform for software customization and integration with other systems.


Other System Features Include:


• Rapid prototyping of new designs and ideas without the need for costly photomasks saves you time and money.


• Choose the ideal stage that meets the requirements for your specific processing. Piezo electric and linear drive stages are available, with recommendations made based on your individual needs.
  
  
• Integrated vibration isolation provides for process repeatability and robustness.


• IMP’s legendary customer service, engineering, and support services ensure your success, including unlimited phone/email support, full customer training both in our factory and at your site, complete factory testing and qualification prior to system shipment, and installation at your site by a qualified IMP field service engineer.

Click here to download the SF-100 XTEND brochure.